Jeroen De Coster, imec

Joren received the master’s degree in electrical power engineering from the KULeuven in Leuven, Belgium in 2001 and the PhD degree in electrical engineering from the same university in 2006 after a study on the design, modelling and characterisation of RF-MEMS devices. Since 2006 he is with imec, Belgium, where he has been working on the development of measurement tools and procedures for functional characterization as well as yield and reliability testing of various types of MEMS devices, such as micromirrors, resonators, pressure sensors, ultrasound transducers and thin film packages. Moving into other application areas he also developed a tester for MRAM memory arrays and more recently a number of test stations for the characterization of imec’s silicon photonics technology platform.

Test Station for Flexible Semi-Automatic Wafer-Level Silicon Photonics Testing (Author: Jeroen De Coster, imec. Presenter: Bryan Bolt, FormFactor)

Silicon photonics technologies are a particularly attractive solution for developing low-cost optical interconnects with high performance. imec is developing a silicon photonics technology platform. Developing this platform requires continuous process optimization and design verification, both of which are enabled by the flexible wafer-level test solution that is presented in this paper. The test station enables semi-automatic optical and electro-optical testing of passive and active silicon photonics components and circuits, including waveguides, fiber grating couplers, photodetectors, modulators, filters etc. The measured insertion loss of fiber grating couplers is repeatable to within 0.07 dB (6s), for photodetector responsivity the repeatability is around 0.02 A/W (6s). Calibration procedures have been designed to ensure the long-term reproducibility of measurement results. This is demonstrated with wafer-level measurement data for fiber grating couplers and photodetectors that were gathered over a five-month period. The reproducibility over this period is 0.8 dB for the insertion loss and 0.09 A/W for the responsivity measurement.