Bryan Bolt, Director of Engineering, Systems Business Unit, FormFactor

Bryan C. Bolt is Director of Engineering, Systems, at FormFactor. He has worked in the fields of optics and semiconductor capital equipment since 1988 in various engineering and technical management roles with companies including Etec Systems, Applied Materials, ESI, and Novellus Systems. Bryan holds a PhD in electrical engineering from the University of North Carolina at Charlotte and is a licensed professional mechanical engineer (P.E.) in the state of Oregon.

Test Station for Flexible Semi-Automatic Wafer-Level Silicon Photonics Testing (Author: Jeroen De Coster, imec. Presenter: Bryan Bolt, FormFactor)

Silicon photonics technologies are a particularly attractive solution for developing low-cost optical interconnects with high performance. imec is developing a silicon photonics technology platform. Developing this platform requires continuous process optimization and design verification, both of which are enabled by the flexible wafer-level test solution that is presented in this paper. The test station enables semi-automatic optical and electro-optical testing of passive and active silicon photonics components and circuits, including waveguides, fiber grating couplers, photodetectors, modulators, filters etc. The measured insertion loss of fiber grating couplers is repeatable to within 0.07 dB (6s), for photodetector responsivity the repeatability is around 0.02 A/W (6s). Calibration procedures have been designed to ensure the long-term reproducibility of measurement results. This is demonstrated with wafer-level measurement data for fiber grating couplers and photodetectors that were gathered over a five-month period. The reproducibility over this period is 0.8 dB for the insertion loss and 0.09 A/W for the responsivity measurement.